Gary S. May, ''Fundamentals of Semiconductor Fabrication''

Fundamentals of Semiconductor Fabrication

Gary S. May, ''Fundamentals of Semiconductor Fabrication''
Wiley 2003 | ISBN-10: 0471232793 | PDF | 352Pages | 28,8 MB

Offers a basic, up-to-date introduction to semiconductor fabrication technology, including both the theoretical and practical aspects of all major steps in the fabrication sequence
Presents comprehensive coverage of process sequences
Introduces readers to modern simulation tools
Addresses the practical aspects of integrated circuit fabrication

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